Guidance to exhaust ventilation in classic semiconductor applications and facilities. Guidebook provides general guidelines for establishing inhouse standards of good practice, training programs, and design criteria. Includes audit guideline for monitoring the performance of ventilation systems. SI and US units. 27 charts, 5 forms, 6 checklists, 2 model specifications. Note copyright date: 1995. Udated 2007.
The SCGB has not been kept completely up to date. Consider it "classic" ventilation for SCEV.
ISBN 1-883992-08-7; 200 pages; Special $69; ©1995.